- All sections
- C - Chemistry; metallurgy
- C23C - Coating metallic material; coating material with metallic material; surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
- C23C 16/24 - Deposition of silicon only
Patent holdings for IPC class C23C 16/24
Total number of patents in this class: 842
10-year publication summary
59
|
58
|
77
|
86
|
76
|
77
|
58
|
65
|
83
|
21
|
2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 |
Principal owners for this class
Owner |
All patents
|
This class
|
---|---|---|
Applied Materials, Inc. | 16587 |
82 |
Tokyo Electron Limited | 11599 |
64 |
Sumco Corporation | 1116 |
41 |
Kokusai Electric Corporation | 1791 |
41 |
Wacker Chemie AG | 2091 |
29 |
Shin-Etsu Chemical Co., Ltd. | 5132 |
23 |
ASM IP Holding B.V. | 1715 |
21 |
L'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude | 3515 |
14 |
Shin-Etsu Handotai Co., Ltd. | 1277 |
14 |
Versum Materials US, LLC | 591 |
11 |
Silcotek Corp. | 64 |
10 |
Taiwan Semiconductor Manufacturing Company, Ltd. | 36809 |
8 |
Lam Research Corporation | 4775 |
8 |
Group14 Technologies, Inc. | 73 |
8 |
High-purity Silicon Corporation | 78 |
8 |
Samsung Electronics Co., Ltd. | 131630 |
7 |
Dow Corning Corporation | 1072 |
7 |
Tokuyama Corporation | 1248 |
7 |
ULVAC, Inc. | 1448 |
7 |
QROMIS, Inc. | 87 |
7 |
Other owners | 425 |